DFM/Mask Verification

Opens and displays the ultra-large scale data of more than 100GB at high speed.
Multitude of built-in analysis functions allow for the acceleration of thorough LSI analysis and sharing of results.
Achieves high scalability through a high level, highly functional, scripting API language “AXEL”.

• High speed processing of ultra-large scale data
• Overlapping display of design data, photomask data, and image files
• Intuitive operability that anyone can easily use
• Various analysis functions centering on a full range of length measurement functions

• Advanced equipotential tracking and circuit diagram generation
• Cross-sectional and 3D display compatible with interlocking display using common simple rules

• Optimizes the inspection and analysis environment by linking with various equipments to improve equipment operation rates

• Adopted as a control platform for various equipments

■Examples of customized tools on HOTSCOPE, that added I/F functions for manufacturing, inspection, and analysis equipment.